Mattson Technology Inc.

$MTSN - Nasdaq - Semiconductors
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Mattson Technology Ships Helios XP Systems to Major Foundry for High Volume 2Xnm Production

FREMONT, CA -- (Marketwired) -- 06/20/13 -- Mattson Technology Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used for the manufacture of semiconductors, today announced that it has shipped multiple systems of its Helios® XP rapid thermal processing (RTP) system for use in mass production at a major foundry. The systems will support the foundry's 2Xnm capacity ramp by offering leading temperature control for reliable device manufacturing coupled with a low cost of ownership (CoO).

"Our customer decided to select the Helios XP systems to ramp their manufacturing capacity based on device results meeting their stringent requirements. These results were achieved on our most advanced RTP platform equipped with leading temperature measurement and control capabilities," said Johannes Keppler, Vice President and General Manager of Mattson Technology's Thermal Products Group. "After intensive qualification in R&D facilities and verification of the systems capabilities though pilot production, we are now entering the high volume production stage and are supporting multi-system orders to this foundry."

Keppler added; "these shipments into a leading manufacturing fab continue to solidify our foundry position and prove our RTP system's capabilities in high volume production. We are looking forward to enabling our customers to manufacture at these advanced technology nodes and to help them continuously improve the performance of their devices."

About Mattson Technology, Inc.
Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. We are a leading supplier of plasma and rapid thermal processing equipment to the global semiconductor industry, and operate in three primary product sectors: Dry Strip, Rapid Thermal Processing and Etch. Through manufacturing and design innovation, we have produced technologically advanced systems that provide productive and cost-effective solutions for customers fabricating current- and next-generation semiconductor devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone: (800) MATTSON / (510) 657-5900. Internet: www.mattson.com.

"Safe Harbor" Statement Under the Private Securities Litigation Reform Act of 1995: This news release contains forward-looking statements. All statements other than statements of historical fact are statements that could be deemed forward-looking statements, including but not limited to statements of the plans, strategies and objectives of management for future operations. Forward-looking statements address matters that are subject to a number of risks and uncertainties that can cause actual results to differ materially from those expressed or implied by such forward-looking statements and assumptions. Such risks and uncertainties include, but are not limited to: macroeconomic and geopolitical trends and events; end-user demand for semiconductors; customer demand for semiconductor manufacturing equipment; the timing of significant customer orders for the Company's products; customer acceptance of delivered products and the Company's ability to collect amounts due upon shipment and upon acceptance; the Company's ability to timely manufacture, deliver and support ordered products; the Company's ability to bring new products to market and to gain market share with such products; customer rate of adoption of new technologies; risks inherent in the development of complex technology; the timing and competitiveness of new product releases by the Company's competitors; the Company's ability to align its cost structure with market conditions; and other risks and uncertainties described in the Company's Forms 10-K, 10-Q and other filings with the Securities and Exchange Commission. The Company assumes no obligation to update the information provided in this news release.

Mattson Technology Investor Contact
J. Michael Dodson
tel +1-510-657-5900

Source: Mattson Technology, Inc.

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